上海微技术工业研究院（简称“工研院”）致力于“超越摩尔”技术和物联网应用的创新和产业化。在中科院微系统所和国家智能传感器创新中心的协同创新框架下，工研院集研发、工程、培育于一体，为创新企业及合作伙伴提供全方位服务和解决方案。目前，工研院已和国内外众多的产、学、研组织建立了紧密的合作关系，实现创新成果的高效率产业化，加速“超越摩尔”技术和物联网的生态系统建立。

工研院“超越摩尔”研发中试线提供MEMS、AIN、硅光子、微流控和生物光电子等“超越摩尔”核心工艺，为设计、设备、材料企业提供高效的研发和中试服务，实现从研发到量产无缝对接。

Shanghai Institute of Microtechnology Industry (SII) is committed to the innovation and industrialization of "beyond Moore" technology and iot applications. Under the collaborative innovation framework of the Institute of Microsystems of the Chinese Academy of Sciences and the National Intelligent Sensor Innovation Center, ITRI integrates research and development, engineering and cultivation, and provides a full range of services and solutions for innovative enterprises and partners. At present, ITRI has established close cooperative relations with many domestic and foreign industry, academic and research organizations, to achieve efficient industrialization of innovative achievements, and accelerate the establishment of "beyond Moore" technology and the Internet of Things ecosystem.

Itri's "Beyond Moore" R&D pilot line provides "Beyond Moore" core processes such as MEMS, AIN, silicon photonics, microfluidic and bio-photoelectronics, and provides efficient R&D and pilot services for design, equipment and material enterprises, realizing seamless connection from R&D to mass production.